BULK ACOUSTIC WAVE RESONATOR
Disclosed is a bulk acoustic wave resonator (BAWR). The BAWR includes a bulk acoustic wave resonance unit with a first electrode, a second electrode, and a piezoelectric layer. The piezoelectric layer is disposed between the first electrode and the second electrode. An air edge is formed at a distan...
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Main Authors | , , , , , |
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Format | Patent |
Language | English |
Published |
31.08.2017
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Subjects | |
Online Access | Get full text |
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Summary: | Disclosed is a bulk acoustic wave resonator (BAWR). The BAWR includes a bulk acoustic wave resonance unit with a first electrode, a second electrode, and a piezoelectric layer. The piezoelectric layer is disposed between the first electrode and the second electrode. An air edge is formed at a distance from a center of the bulk acoustic wave resonance unit. |
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Bibliography: | Application Number: US201715494866 |