IN SITU CLEANING APPARATUS AND SYSTEM THEREOF
An apparatus includes: a sprinkler configured for spraying liquid; a conduit with a nano-particle coated surface; a sensor associated with the conduit, wherein the sensor is configured to detect a signal corresponding to a film deposition on the nano-particle coated surface; and a controller coupled...
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Main Authors | , , , |
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Format | Patent |
Language | English |
Published |
10.08.2017
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Subjects | |
Online Access | Get full text |
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Summary: | An apparatus includes: a sprinkler configured for spraying liquid; a conduit with a nano-particle coated surface; a sensor associated with the conduit, wherein the sensor is configured to detect a signal corresponding to a film deposition on the nano-particle coated surface; and a controller coupled with the sensor and the sprinkler, wherein the controller is configured to regulate liquid spraying of the sprinkler over the nano-particle coated surface. |
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Bibliography: | Application Number: US201715497904 |