IN SITU CLEANING APPARATUS AND SYSTEM THEREOF

An apparatus includes: a sprinkler configured for spraying liquid; a conduit with a nano-particle coated surface; a sensor associated with the conduit, wherein the sensor is configured to detect a signal corresponding to a film deposition on the nano-particle coated surface; and a controller coupled...

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Bibliographic Details
Main Authors CHIEN LI-HSING, WANG ROUH JIER, HUNG YUNG-TI, CHANG YU-TE
Format Patent
LanguageEnglish
Published 10.08.2017
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Summary:An apparatus includes: a sprinkler configured for spraying liquid; a conduit with a nano-particle coated surface; a sensor associated with the conduit, wherein the sensor is configured to detect a signal corresponding to a film deposition on the nano-particle coated surface; and a controller coupled with the sensor and the sprinkler, wherein the controller is configured to regulate liquid spraying of the sprinkler over the nano-particle coated surface.
Bibliography:Application Number: US201715497904