A Suspended Structure Made of Inorganic Materials and a Method for Manufacturing Same

A device and a method for manufacturing it are disclosed wherein the devices comprises a substrate and at least a first layer and a second layer that are partially etched, all made of inorganic materials, and wherein the at least partially etched first layer and the at least partially etched second...

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Bibliographic Details
Main Authors BEN-BASSAT David, HAVDALA Tal
Format Patent
LanguageEnglish
Published 20.07.2017
Subjects
APPARATUS SPECIALLY ADAPTED THEREFOR
CINEMATOGRAPHY
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
MICROSTRUCTURAL TECHNOLOGY
ORIGINALS THEREFOR
PERFORMING OPERATIONS
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
TRANSPORTING
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Summary:A device and a method for manufacturing it are disclosed wherein the devices comprises a substrate and at least a first layer and a second layer that are partially etched, all made of inorganic materials, and wherein the at least partially etched first layer and the at least partially etched second layer form together a suspended structure, and wherein each of the first layer and the second layer has a different pre-determined shape from the other.
Bibliography:Application Number: US201515324054