TRAP REPLACEMENT MECHANISM AND MICROPARTICLE COMPOSITION ANALYZING APPARATUS

In a microparticle composition analyzing apparatus, when a depressurized chamber is opened to atmospheric pressure in order to replace a trap, a certain amount of time is needed to vacuum out the entire depressurized chamber again and return the depressurized chamber to the reduced pressure state, a...

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Bibliographic Details
Main Authors KOIZUMI Kazuhiro, HASEGAWA Yoshiki, TAKEDA Naoki, ASANO Takamasa
Format Patent
LanguageEnglish
Published 01.06.2017
Subjects
BASIC ELECTRIC ELEMENTS
COMBINED OPERATIONS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
MACHINE TOOLS
METAL-WORKING NOT OTHERWISE PROVIDED FOR
OTHER WORKING OF METAL
PERFORMING OPERATIONS
TRANSPORTING
UNIVERSAL MACHINE TOOLS
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Summary:In a microparticle composition analyzing apparatus, when a depressurized chamber is opened to atmospheric pressure in order to replace a trap, a certain amount of time is needed to vacuum out the entire depressurized chamber again and return the depressurized chamber to the reduced pressure state, and this causes an increase in the dead time of the measurement. Provided is a trap replacement mechanism including a rod that supports a trap for trapping microparticles and a connection portion that includes at least a portion of an auxiliary space connected to a depressurized space in which the trap is provided. The trap can be withdrawn from the depressurized space to the auxiliary space side and opened to atmospheric pressure while the depressurized space is kept in a depressurized state, by moving the rod.
Bibliography:Application Number: US201615333192