STACKED WAFER CASSETTE LOADING SYSTEM

A substrate cassette loading system for docking substrate cassettes to a substrate processing system is provided. A plurality of ports passes substrates into the substrate processing system, wherein a first port of the plurality of ports is vertically above a second port of the plurality of ports. A...

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Bibliographic Details
Main Authors Witkowicki Derek J, KRISTOFFERSEN Candi, GOULD Richard H, AGUILAR Silvia R, WONG Scott, SENN Brandon
Format Patent
LanguageEnglish
Published 11.05.2017
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:A substrate cassette loading system for docking substrate cassettes to a substrate processing system is provided. A plurality of ports passes substrates into the substrate processing system, wherein a first port of the plurality of ports is vertically above a second port of the plurality of ports. A plurality of cassette loaders provides substrate cassettes to the plurality of ports.
Bibliography:Application Number: US201514933987