III-V NITRIDE SEMICONDUCTOR DEVICE
In an embodiment, a III-V nitride semiconductor device comprises an AlGaN epitaxial layer and a metal electrode. The AlGaN epitaxial layer is a C-plane n-type or undoped layer, and the AlGaN epitaxial layer has an epitaxial surface consisting of one or more semi-polar planes. The metal electrode is...
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Main Authors | , , , |
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Format | Patent |
Language | English |
Published |
13.04.2017
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Subjects | |
Online Access | Get full text |
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Summary: | In an embodiment, a III-V nitride semiconductor device comprises an AlGaN epitaxial layer and a metal electrode. The AlGaN epitaxial layer is a C-plane n-type or undoped layer, and the AlGaN epitaxial layer has an epitaxial surface consisting of one or more semi-polar planes. The metal electrode is directly formed on the one or more semi-polar planes. |
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Bibliography: | Application Number: US201514951512 |