III-V NITRIDE SEMICONDUCTOR DEVICE

In an embodiment, a III-V nitride semiconductor device comprises an AlGaN epitaxial layer and a metal electrode. The AlGaN epitaxial layer is a C-plane n-type or undoped layer, and the AlGaN epitaxial layer has an epitaxial surface consisting of one or more semi-polar planes. The metal electrode is...

Full description

Saved in:
Bibliographic Details
Main Authors Lin Kun-Fong, Tsai Chia-Lung, Kuo Wei-Hung, Lin Suh-Fang
Format Patent
LanguageEnglish
Published 13.04.2017
Subjects
Online AccessGet full text

Cover

Loading…
More Information
Summary:In an embodiment, a III-V nitride semiconductor device comprises an AlGaN epitaxial layer and a metal electrode. The AlGaN epitaxial layer is a C-plane n-type or undoped layer, and the AlGaN epitaxial layer has an epitaxial surface consisting of one or more semi-polar planes. The metal electrode is directly formed on the one or more semi-polar planes.
Bibliography:Application Number: US201514951512