SAMPLE POSITIONING METHOD AND CHARGED PARTICLE BEAM APPARATUS

The present invention provides a sample positioning method that can easily and quickly position a target observation area of a sample into a field of view of a first charged particle beam. The method includes: displaying an image including the sample in a display screen; designating an attention poi...

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Bibliographic Details
Main Authors UMEMURA Kaoru, KIYOHARA Masahiro, TAKENO Kengo, UEMOTO Atsushi
Format Patent
LanguageEnglish
Published 30.03.2017
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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Summary:The present invention provides a sample positioning method that can easily and quickly position a target observation area of a sample into a field of view of a first charged particle beam. The method includes: displaying an image including the sample in a display screen; designating an attention point on the basis of the image in the display screen; aligning the position of the sample stage in the direction of an optical axis so that the attention point is positioned in an on-axis point tracer plane perpendicular to the optical axis through an on-axis target point on the optical axis; and moving the attention point to the on-axis target point by performing detection of deviation of the attention point from the on-axis target point and movement in the on-axis point tracer plane; and moving the attention point into a depth of a focus of an charged particle beam optics.
Bibliography:Application Number: US201615279096