EVALUATION SYSTEMS OF BLOCK COPOLYMER PATTERNS

An evaluation system of block copolymer patterns includes a supplier, a plurality of analyzers, and a homopolymer interference remover. The supplier provides a sample including a block copolymer and a homopolymer. The analyzers measure a molecular weight of the block copolymer in the sample, measure...

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Bibliographic Details
Main Authors PARK Hyun-Young, PARK Jung-Dae, KIM Ki-Hyun, LIM Kwang-Shin, SUH Min-Soo
Format Patent
LanguageEnglish
Published 30.03.2017
Subjects
CHEMISTRY
COMPOSITIONS BASED THEREON
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVINGCARBON-TO-CARBON UNSATURATED BONDS
MEASURING
METALLURGY
ORGANIC MACROMOLECULAR COMPOUNDS
PHYSICS
TESTING
THEIR PREPARATION OR CHEMICAL WORKING-UP
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Summary:An evaluation system of block copolymer patterns includes a supplier, a plurality of analyzers, and a homopolymer interference remover. The supplier provides a sample including a block copolymer and a homopolymer. The analyzers measure a molecular weight of the block copolymer in the sample, measure a preliminary block ratio, the preliminary block ratio corresponding to a total ratio in the sample of each block in the block copolymer, and selectively measure a ratio of the homopolymer in the sample. The homopolymer interference remover subtracts the ratio of the homopolymer from the preliminary block ratio.
Bibliography:Application Number: US201615242748