SUPPORTING UNIT AND SUBSTRATE-TREATING APPARATUS INCLUDING THE SAME

A supporting unit is provided. The supporting unit includes a body, an alignment member, at least one sensor, and a controller. The body has a top surface supporting a target object. The alignment member is disposed in the body and adjusts a position of the target object. The sensor senses the posit...

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Bibliographic Details
Main Authors CHANG In Bae, JANG Sangdon, PARK Sang-Hyun
Format Patent
LanguageEnglish
Published 29.12.2016
Subjects
COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT
DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING
MACHINE TOOLS
MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS
METAL-WORKING NOT OTHERWISE PROVIDED FOR
PERFORMING OPERATIONS
TRANSPORTING
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Summary:A supporting unit is provided. The supporting unit includes a body, an alignment member, at least one sensor, and a controller. The body has a top surface supporting a target object. The alignment member is disposed in the body and adjusts a position of the target object. The sensor senses the position of the target object. The controller controls the alignment member and the sensor member. The alignment member includes a magnet that adjusts the position of the target object according to an electromagnetic force; and a coil that applies the electromagnetic force to the magnet.
Bibliography:Application Number: US201615168995