THREE-AXIS ROTATIONAL ACCELERATION SENSOR

A rotational acceleration sensor having a substrate, a mass movable with respect to the substrate, a suspension means suspending the mass movably relative to the substrate, a detection means for detecting a state of the mass deflected with respect to an idle position, and a detection means encompass...

Full description

Saved in:
Bibliographic Details
Main Author Reimann Mathias
Format Patent
LanguageEnglish
Published 22.12.2016
Subjects
INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
MEASURING
MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK
PHYSICS
TESTING
Online AccessGet full text

Cover

More Information
Summary:A rotational acceleration sensor having a substrate, a mass movable with respect to the substrate, a suspension means suspending the mass movably relative to the substrate, a detection means for detecting a state of the mass deflected with respect to an idle position, and a detection means encompassing a first detection unit for detecting a deflected state of the mass i.e., a pivoting of the mass around a first axis substantially perpendicular to a principal extension plane of the substrate as a result of a rotational acceleration of the rotational acceleration sensor around the first axis. The detection means also encompassing a second detection unit for detecting a deflected state of the mass, i.e., a pivoting of the mass around a second axis substantially parallel to the principal extension plane of the substrate as a result of a rotational acceleration of the rotational acceleration sensor around the second axis.
Bibliography:Application Number: US201615182344