METROLOGY SAMPLING METHOD WITH SAMPLING RATE DECISION SCHEME AND COMPUTER PROGRAM PRODUCT THEREOF
In a metrology sampling method with a sampling rate decision scheme, a mean absolute percentage error (MAPE) and a maximum absolute percentage error (MaxErr) of visual metrology values of all workpieces in a set of determinative samples (DS), and various index values that can detect various status c...
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Main Authors | , , , |
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Format | Patent |
Language | English |
Published |
01.12.2016
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Subjects | |
Online Access | Get full text |
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Summary: | In a metrology sampling method with a sampling rate decision scheme, a mean absolute percentage error (MAPE) and a maximum absolute percentage error (MaxErr) of visual metrology values of all workpieces in a set of determinative samples (DS), and various index values that can detect various status changes of a process tool (such as maintenance operation, parts changing, parameter adjustment, etc.), and/or information abnormalities of the process tool (such as abnormal process data, parameter drift/shift, abnormal metrology data, etc.) appearing in a manufacturing process are applied to develop an automated sampling decision (ASD) scheme for reducing a workpiece sampling rate while VM accuracy is still sustained. |
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Bibliography: | Application Number: US201615158604 |