OLED MATERIAL VACUUM THERMAL EVAPORATING MASK PLATE

• Main Authors: WU Tsungyuan, LIU Yawei
• Format: Patent
• Language: English
• Published: 01.12.2016
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRICITY; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

The present invention provides an OLED material vacuum thermal evaporating mask plate, comprising a mask frame (1), a quickset (3) fixed on the mask frame (1) and a mask (5) fixed on the quickset (3); the mask frame (1) comprises four edges, and the four edges surround to form an opening corresponding to the mask (5); each edge of the mask frame (1) comprises a groove (11) dented at the upper surface; the quickset (3) is fixed in the groove (11); the mask (5) is fixed on the quickset (3) by point weld, and welding points (7) are on the quickset (3). When the mask deforms and the replacement is necessary, only the quickset is extracted for polishing or is replaced. The mask frame can be repeatedly used to diminish the waste amount and to raise the availability of the mask frame. Meanwhile, the spare amount of the mask frame can be reduced to save material and production cost.