Wet Method for the Production of Thin Films

A method produces thin films. The method includes preparing a solution containing transition metal oxide precursors, a chelating agent, and a polar organic solvent. The solution is agitated in order to form a sol. The sol is used in the form of the transition metal oxide film. The chelating agent is...

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Bibliographic Details
Main Authors Eskenazi David, Paez Carlos, Calberg Cedric, Alie Christelle, Pirard Jean-Paul, Heinrichs Benoit, Liquet Dimitri
Format Patent
LanguageEnglish
Published 29.09.2016
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Summary:A method produces thin films. The method includes preparing a solution containing transition metal oxide precursors, a chelating agent, and a polar organic solvent. The solution is agitated in order to form a sol. The sol is used in the form of the transition metal oxide film. The chelating agent is selected from among di- or tri-aliphatic carboxylic acids, or salts or mixtures thereof. The polar organic solvent has a boiling temperature at atmospheric pressure of less than 150° C.
Bibliography:Application Number: US201415033622