LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
A lithographic projection apparatus includes a support structure to hold a patterning device, the patterning device configured to pattern a beam of radiation according to a desired pattern; a projection system to project the patterned beam onto a target portion of a substrate; a substrate table conf...
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Main Authors | , , , , , , , , , , , , , , |
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Format | Patent |
Language | English |
Published |
29.09.2016
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Subjects | |
Online Access | Get full text |
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