SYNTHESIS OF SI-BASED NANO-MATERIALS USING LIQUID SILANES

• Main Authors: Anderson Kenneth, Sailer Robert A, Hoey Justin, Srinivasan Guruvenket
• Format: Patent
• Language: English
• Published: 01.09.2016
• Subjects: ADHESIVES; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; COMPOUNDS THEREOF; DIFFUSION TREATMENT OF METALLIC MATERIAL; DYES; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; INORGANIC CHEMISTRY; MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FORELSEWHERE; METALLURGY; MISCELLANEOUS APPLICATIONS OF MATERIALS; MISCELLANEOUS COMPOSITIONS; NATURAL RESINS; NON-METALLIC ELEMENTS; PAINTS; POLISHES; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

An apparatus and non-vapor-pressure dependent methods of producing silicon particles such as nanoparticles (Si-NPs), quantum dots (Si-QDs) and Si-nanocrystals (Si-NCs) as well as particle embedded thin films are disclosed. Nano or micro scale droplets of a liquid silane composition are polymerized in a gas phase with heat or radiation to produce particles that are then collected. Droplets from a droplet generator pass through a flow channel with a reaction zone that is heated or irradiated to form the particles that are collected in a collector. The flow of droplets may be assisted with carrier or flow gases that may be heated. Liquid silane composition solutions may also include metal, non-metal or metalloid dopants and solvents. Particle surfaces can also be passivated or functionalized. Particles and droplets of liquid silane can also be co-deposited and heated to produce particle embedded thin films.