CHARACTERIZATION OF DIELECTRIC MATERIALS
A system and a method for characterizing a dielectric material are provided. The system and method generally include applying an excitation signal to electrodes on opposing sides of the dielectric material to evaluate a property of the dielectric material. The method can further include measuring th...
Saved in:
Main Authors | , , , , , , , , , , , |
---|---|
Format | Patent |
Language | English |
Published |
28.07.2016
|
Subjects | |
Online Access | Get full text |
Cover
Loading…
Summary: | A system and a method for characterizing a dielectric material are provided. The system and method generally include applying an excitation signal to electrodes on opposing sides of the dielectric material to evaluate a property of the dielectric material. The method can further include measuring the capacitive impedance across the dielectric material, and determining a variation in the capacitive impedance with respect to either or both of a time domain and a frequency domain. The measured property can include pore size and surface imperfections. The method can still further include modifying a processing parameter as the dielectric material is formed in response to the detected variations in the capacitive impedance, which can correspond to a non-uniformity in the dielectric material. |
---|---|
Bibliography: | Application Number: US201514602370 |