CHARACTERIZATION OF DIELECTRIC MATERIALS

A system and a method for characterizing a dielectric material are provided. The system and method generally include applying an excitation signal to electrodes on opposing sides of the dielectric material to evaluate a property of the dielectric material. The method can further include measuring th...

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Bibliographic Details
Main Authors Maxey Lonnie C, Armstrong Beth L, King Danny J, Babinec Susan, Payzant Edward A, Hagans Patrick L, Daniel Claus, Sabau Adrian S, Howe Jane Y, Nembhard Nicole S, Wood, III David L, Dinwiddie Ralph B
Format Patent
LanguageEnglish
Published 28.07.2016
Subjects
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
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Summary:A system and a method for characterizing a dielectric material are provided. The system and method generally include applying an excitation signal to electrodes on opposing sides of the dielectric material to evaluate a property of the dielectric material. The method can further include measuring the capacitive impedance across the dielectric material, and determining a variation in the capacitive impedance with respect to either or both of a time domain and a frequency domain. The measured property can include pore size and surface imperfections. The method can still further include modifying a processing parameter as the dielectric material is formed in response to the detected variations in the capacitive impedance, which can correspond to a non-uniformity in the dielectric material.
Bibliography:Application Number: US201514602370