BRUSHLESS ROTARY PLASMA ELECTRODE STRUCTURE AND FILM COATING SYSTEM
A brushless rotary plasma electrode structure is disclosed. The brushless rotary plasma electrode structure includes a main body, a plurality of guided portions, and a plurality of conducting-through members. The main body further includes a plurality of electrode portions that have a first salient...
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Main Authors | , , |
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Format | Patent |
Language | English |
Published |
21.07.2016
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Subjects | |
Online Access | Get full text |
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