BRUSHLESS ROTARY PLASMA ELECTRODE STRUCTURE AND FILM COATING SYSTEM

A brushless rotary plasma electrode structure is disclosed. The brushless rotary plasma electrode structure includes a main body, a plurality of guided portions, and a plurality of conducting-through members. The main body further includes a plurality of electrode portions that have a first salient...

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Bibliographic Details
Main Authors LIN KUANG-YU, LIN SHIHIN, CHANG CHIA-HAO
Format Patent
LanguageEnglish
Published 21.07.2016
Subjects
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