Metal-Insulator-Metal Capacitor with Current Leakage Protection

A metal insulator metal (MIM) capacitor includes a top electrode, a first via contacting a first surface of the top electrode, a bottom electrode, a second via contacting a second surface of the bottom electrode, and an insulator between the top electrode and the bottom electrode. One of the top and...

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Bibliographic Details
Main Authors CHIANG WENUAN, CHEN KUO-JI, SONG MING-HSIANG, WANG CHEN-JONG, CHU HUEYI
Format Patent
LanguageEnglish
Published 10.03.2016
Subjects
ELECTRICITY
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Summary:A metal insulator metal (MIM) capacitor includes a top electrode, a first via contacting a first surface of the top electrode, a bottom electrode, a second via contacting a second surface of the bottom electrode, and an insulator between the top electrode and the bottom electrode. One of the top and the bottom electrodes includes a first part and a second part. The first part has a first edge and a second edge opposing the first edge. The second part shares the second edge with the first part. At least a portion of the first edge contacts the respective via, and a first one of the first and the second edges is longer than a second one of the first and the second edges.
Bibliography:Application Number: US201514929601