MAGNET ARRAY FOR MOVING MAGNET PLANAR MOTOR

A stage mover for moving a stage relative to a stage base includes a conductor assembly and a magnet assembly. The conductor assembly is coupled to the stage base and a plurality of coil units with each coil unit having one or more coils. Each of the coils has a coil width. The magnet assembly inter...

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Bibliographic Details
Main Authors HIRANO KAZUHIRO, YANG PAI-HSUEH, GOTO TAKAKUNI
Format Patent
LanguageEnglish
Published 26.11.2015
Subjects
APPARATUS SPECIALLY ADAPTED THEREFOR
CINEMATOGRAPHY
CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
DYNAMO-ELECTRIC MACHINES
ELECTRICITY
ELECTROGRAPHY
GENERATION
HOLOGRAPHY
MATERIALS THEREFOR
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
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Summary:A stage mover for moving a stage relative to a stage base includes a conductor assembly and a magnet assembly. The conductor assembly is coupled to the stage base and a plurality of coil units with each coil unit having one or more coils. Each of the coils has a coil width. The magnet assembly interacts with the conductor assembly and includes a plurality of spaced apart magnet arrays. Each of the magnet arrays is spaced apart from each adjacent magnet array by an array gap that is at least equal to the coil width so that independent and symmetric magnetic flux distribution can be achieved for each of the magnet arrays.
Bibliography:Application Number: US201514719821