MEMS Switch

A micromachined switch has a cavity with an atmosphere configured to reduce sparking between switch contacts during opening and closing operations.

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Bibliographic Details
Main Authors STENSON BERNARD P, LEE DARREN R, MORRISSEY MICHAEL, FITZGERALD PADRAIG L
Format Patent
LanguageEnglish
Published 12.11.2015
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SWITCHES
ELECTRICITY
EMERGENCY PROTECTIVE DEVICES
MICROSTRUCTURAL TECHNOLOGY
PERFORMING OPERATIONS
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
RELAYS
SELECTORS
TRANSPORTING
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Summary:A micromachined switch has a cavity with an atmosphere configured to reduce sparking between switch contacts during opening and closing operations.
Bibliography:Application Number: US201514667022