CAPACITIVE TRANSDUCER
A capacitive transducer has a back plate including a fixed electrode, a diaphragm facing the back plate with an air gap interposed therebetween, the diaphragm acting as a movable electrode, at least a first stopper of a first protruding length, and a second stopper of a second protruding length. The...
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Main Author | |
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Format | Patent |
Language | English |
Published |
17.09.2015
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Subjects | |
Online Access | Get full text |
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