CAPACITIVE TRANSDUCER

A capacitive transducer has a back plate including a fixed electrode, a diaphragm facing the back plate with an air gap interposed therebetween, the diaphragm acting as a movable electrode, at least a first stopper of a first protruding length, and a second stopper of a second protruding length. The...

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Bibliographic Details
Main Author OKUGAWA AKIHIRO
Format Patent
LanguageEnglish
Published 17.09.2015
Subjects
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