CAPACITIVE TRANSDUCER

A capacitive transducer has a back plate including a fixed electrode, a diaphragm facing the back plate with an air gap interposed therebetween, the diaphragm acting as a movable electrode, at least a first stopper of a first protruding length, and a second stopper of a second protruding length. The...

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Bibliographic Details
Main Author OKUGAWA AKIHIRO
Format Patent
LanguageEnglish
Published 17.09.2015
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Summary:A capacitive transducer has a back plate including a fixed electrode, a diaphragm facing the back plate with an air gap interposed therebetween, the diaphragm acting as a movable electrode, at least a first stopper of a first protruding length, and a second stopper of a second protruding length. The first and second stoppers protrude from at least either the surface on the back plate near the air gap or the surface on the diaphragm near the air gap. The first stopper is provided at a position corresponding to a first position on the diaphragm. The second the stopper is provided at a position corresponding to a second position on the diaphragm. An amount of displacement of the diaphragm at the first position is greater than an amount of displacement of the diaphragm at the second position. The protruding length of the first stopper is shorter than the protruding length of the second stopper.
Bibliography:Application Number: US201514623217