ON-TOOL MASS FLOW CONTROLLER DIAGNOSTIC SYSTEMS AND METHODS

Mass flow controllers with on-tool diagnostic capabilities and methods for on-tool diagnosis of mass flow controllers are disclosed herein. One disclosed method includes effectuating a particular modification to the heating of the one or more heating-sensing elements, and monitoring one or more outp...

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Bibliographic Details
Main Authors SMIRNOV ALEXEI V, NAGARAJAN ARUN
Format Patent
LanguageEnglish
Published 17.09.2015
Subjects
CONTROLLING
MEASURING
MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUIDLEVEL
METERING BY VOLUME
PHYSICS
REGULATING
SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
TESTING
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Summary:Mass flow controllers with on-tool diagnostic capabilities and methods for on-tool diagnosis of mass flow controllers are disclosed herein. One disclosed method includes effectuating a particular modification to the heating of the one or more heating-sensing elements, and monitoring one or more outputs of the mass flow sensor to obtain present data that characterizes a present operation of the mass flow sensor in response to the particular modification to the heating. Reference data is obtained that characterizes prior operation of the mass flow sensor, and the present operation of the mass flow sensor is compared to the prior operation of the mass flow sensor to assess whether the operation of the mass flow sensor changed over time.
Bibliography:Application Number: US201414321523