METHOD FOR PRODUCING HIGHER SILANES
The invention relates to a method for producing dimeric and/or trimeric silicon compounds, in particular silicon halogen compounds. The claimed method is also suitable for producing corresponding germanium compounds. The invention also relates to a device for carrying out said method to the use of t...
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Main Authors | , , |
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Format | Patent |
Language | English |
Published |
17.09.2015
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Subjects | |
Online Access | Get full text |
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Summary: | The invention relates to a method for producing dimeric and/or trimeric silicon compounds, in particular silicon halogen compounds. The claimed method is also suitable for producing corresponding germanium compounds. The invention also relates to a device for carrying out said method to the use of the produced silicon compounds. |
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Bibliography: | Application Number: US201514725131 |