CHARGED PARTICLE BEAM APPARATUS

A charged particle beam apparatus includes a charged particle beam source which irradiates a sample with a charged particle beam, an electromagnetic lens, a lens control electric source for controlling strength of a convergence effect of the electromagnetic lens; and a phase compensation circuit whi...

Full description

Saved in:
Bibliographic Details
Main Authors TANIMOTO SAYAKA, FUKUDA MUNEYUKI, OBARA KENJI, MORITA KENICHI, SUZUKI NAOMASA, SAKAKIBARA MAKOTO
Format Patent
LanguageEnglish
Published 13.08.2015
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
Online AccessGet full text

Cover

More Information
Summary:A charged particle beam apparatus includes a charged particle beam source which irradiates a sample with a charged particle beam, an electromagnetic lens, a lens control electric source for controlling strength of a convergence effect of the electromagnetic lens; and a phase compensation circuit which is connected to the lens control electric source in parallel with the electromagnetic lens, and controls a lens current at the time of switching the strength of the convergence effect of the electromagnetic lens such that the lens current monotonically increases or monotonically decreases.
Bibliography:Application Number: US201514616658