METHOD FOR MANUFACTURING CONDUCTIVE PATTERN AND DEVICE HAVING CONDUCTIVE PATTERN

A conductive pattern forming method includes forming a conductive layer on a substrate. An organic pattern including a plurality of fillers condensed in a network shape is formed on the conductive layer. A conductive pattern to which the shapes of the plurality of fillers condensed in the network sh...

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Bibliographic Details
Main Authors LEE BYEONG-JIN, LIM JEE-HUN, KANG SUNG KU
Format Patent
LanguageEnglish
Published 02.07.2015
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Summary:A conductive pattern forming method includes forming a conductive layer on a substrate. An organic pattern including a plurality of fillers condensed in a network shape is formed on the conductive layer. A conductive pattern to which the shapes of the plurality of fillers condensed in the network shape are transferred is formed by dry-etching the conductive layer using the organic pattern as a mask. The organic pattern is eliminated.
Bibliography:Application Number: US201414290722