METHOD FOR MANUFACTURING CONDUCTIVE PATTERN AND DEVICE HAVING CONDUCTIVE PATTERN
A conductive pattern forming method includes forming a conductive layer on a substrate. An organic pattern including a plurality of fillers condensed in a network shape is formed on the conductive layer. A conductive pattern to which the shapes of the plurality of fillers condensed in the network sh...
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Main Authors | , , |
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Format | Patent |
Language | English |
Published |
02.07.2015
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Subjects | |
Online Access | Get full text |
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Summary: | A conductive pattern forming method includes forming a conductive layer on a substrate. An organic pattern including a plurality of fillers condensed in a network shape is formed on the conductive layer. A conductive pattern to which the shapes of the plurality of fillers condensed in the network shape are transferred is formed by dry-etching the conductive layer using the organic pattern as a mask. The organic pattern is eliminated. |
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Bibliography: | Application Number: US201414290722 |