SILICON WAVEGUIDES WITH EMBEDDED ACTIVE CIRCUITRY

• Main Authors: MIHAILOVICH ROBERT E, DENATALE JEFFREY F, BORWICK, III ROBERT L, STUPAR PHILIP A
• Format: Patent
• Language: English
• Published: 02.07.2015
• Subjects: OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; PHYSICS

The present disclosure discloses silicon waveguides with embedded active circuitry fabricated from silicon wafers utilizing photolithographic microfabrication techniques to define waveguide structures and embedded circuit recesses for receiving integrated circuitry. The method of fabricating the wav...