OBJECT HOLDER AND LITHOGRAPHIC APPARATUS
An object table to support an object, the object table having a support body, an object holder to hold an object, an opening adjacent an edge of the object holder, and a channel in fluid communication with the opening via a passageway, wherein the channel is defined by a first material which is diff...
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Main Authors | , , , , , , , , , , , , , |
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Format | Patent |
Language | English |
Published |
14.05.2015
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Subjects | |
Online Access | Get full text |
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