OBJECT HOLDER AND LITHOGRAPHIC APPARATUS

An object table to support an object, the object table having a support body, an object holder to hold an object, an opening adjacent an edge of the object holder, and a channel in fluid communication with the opening via a passageway, wherein the channel is defined by a first material which is diff...

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Bibliographic Details
Main Authors STEFFENS KOEN, PIETERSE GERBEN, BLOKS RUUD HENDRIKUS MARTINUS JOHANNES, JACOBS JOHANNES HENRICUS WILHELMUS, SIMONS WILHELMUS FRANCISCUS JOHANNES, LAFARRE RAYMOND WILHELMUS LOUIS, VY VAN VUONG, HOUBEN MARTIJN, OVERKAMP JIM VINCENT, TROMP SIEGFRIED ALEXANDER, LAURENT THIBAULT SIMON MATHIEU, LEMPENS HAN HENRICUS ALDEGONDA, POLET THEODORUS WILHELMUS, CORTIE ROGIER HENDRIKUS MAGDALENA
Format Patent
LanguageEnglish
Published 14.05.2015
Subjects
APPARATUS SPECIALLY ADAPTED THEREFOR
CINEMATOGRAPHY
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
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Summary:An object table to support an object, the object table having a support body, an object holder to hold an object, an opening adjacent an edge of the object holder, and a channel in fluid communication with the opening via a passageway, wherein the channel is defined by a first material which is different to a second material defining the passageway.
Bibliography:Application Number: US201314399137