SUPER JUNCTION SEMICONDUCTOR DEVICE
There is provided a super junction semiconductor device. The super junction semiconductor device includes a cell area and a junction termination area disposed on a substrate, and a transition area disposed between the cell area and the junction termination area, and the cell area, the junction termi...
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Main Authors | , , , , , |
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Format | Patent |
Language | English |
Published |
19.03.2015
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Subjects | |
Online Access | Get full text |
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Summary: | There is provided a super junction semiconductor device. The super junction semiconductor device includes a cell area and a junction termination area disposed on a substrate, and a transition area disposed between the cell area and the junction termination area, and the cell area, the junction termination area, and the transition area each include one or more unit cells comprising a N-type pillar region and a P-type pillar region among a plurality of N-type pillar regions and a P-type pillar regions that are alternated between the cell area and the junction termination area. |
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Bibliography: | Application Number: US201414226500 |