APPARATUS FOR TESTING ELECTRONIC DEVICES

An apparatus is described for burn-in and/or functional testing of microelectronic circuits of unsingulated wafers. A large number of power, ground, and signal connections can be made to a large number of contacts on a wafer. The apparatus has a cartridge that allows for fanning-in of electric paths...

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Main Authors TYSON JEFFREY L, BURKE PAUL W, JOVANOVIC JOVAN, UHER FRANK O, MAENNER THOMAS T, CAO DOAN D, TOMIC JAMES F, DEBOE KENNETH W, SHEPHERD PATRICK M, RICHMOND, II DONALD P, LINDSEY SCOTT E, CARBONE MARK C, VU LONG V
Format Patent
LanguageEnglish
Published 21.08.2014
Subjects
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
TESTING
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Summary:An apparatus is described for burn-in and/or functional testing of microelectronic circuits of unsingulated wafers. A large number of power, ground, and signal connections can be made to a large number of contacts on a wafer. The apparatus has a cartridge that allows for fanning-in of electric paths. A distribution board has a plurality of interfaces that are strategically positioned to provide a dense configuration. The interfaces are connected through flexible attachments to an array of first connector modules. Each one of the first connector modules can be independently connected to a respective one of a plurality of second connector modules, thereby reducing stresses on a frame of the apparatus. Further features include for example a piston that allows for tight control of forces exerted by terminals onto contacts of a wafer.
Bibliography:Application Number: US201414263826