METHODS AND APPARATUS FOR USE WITH EXTREME ULTRAVIOLET LIGHT HAVING CONTAMINATION PROTECTION

• Main Authors: GARCIA RUDY, TORCZYNSKI JOHN R, GALLIS MICHAIL A, CHILESE FRANK, KLEBANOFF LEONARD E, GELLER ANTHONY S, DELGADO GILDARDO R, RADER DANIEL J
• Format: Patent
• Language: English
• Published: 21.08.2014
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

An apparatus for use with extreme ultraviolet (EUV) light comprising A) a duct having a first end opening, a second end opening and an intermediate opening intermediate the first end opening the second end opening, B) an optical component disposed to receive EUV light from the second end opening or...