IMPRINT LITHOGRAPHY
A method of depositing an imprintable medium onto a target area of a substrate for imprint lithography is disclosed. The method includes moving the substrate, a print head comprising a nozzle to eject an imprintable medium onto the substrate, or both, relative to the other in a first direction acros...
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Main Authors | , , , , |
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Format | Patent |
Language | English |
Published |
17.07.2014
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Subjects | |
Online Access | Get full text |
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