Detecting Defects on a Wafer Using Template Image Matching

Various embodiments for detecting defects on a wafer are provided. Some embodiments include matching a template image, in which at least some pixels are associated with regions in the device having different characteristics, to output of an electron beam inspection system and applying defect detecti...

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Main Authors RUNYON J. REX, LAUBER JAN A, CHU XING
Format Patent
LanguageEnglish
Published 10.07.2014
Subjects
CALCULATING
COMPUTING
COUNTING
IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
PHYSICS
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Abstract Various embodiments for detecting defects on a wafer are provided. Some embodiments include matching a template image, in which at least some pixels are associated with regions in the device having different characteristics, to output of an electron beam inspection system and applying defect detection parameters to pixels in the output based on the regions that the pixels in the output are located within to thereby detect defects on the wafer.
AbstractList Various embodiments for detecting defects on a wafer are provided. Some embodiments include matching a template image, in which at least some pixels are associated with regions in the device having different characteristics, to output of an electron beam inspection system and applying defect detection parameters to pixels in the output based on the regions that the pixels in the output are located within to thereby detect defects on the wafer.
Author LAUBER JAN A
RUNYON J. REX
CHU XING
Author_xml – fullname: RUNYON J. REX
– fullname: LAUBER JAN A
– fullname: CHU XING
BookMark eNrjYmDJy89L5WSwckktSU0uycxLV3BJTQOyihXy8xQSFcIT01KLFEKLQRIhqbkFOYklqQqeuYnpqQq-iSXJGUBxHgbWtMSc4lReKM3NoOzmGuLsoZtakB-fWlyQmJyal1oSHxpsZGBoYmhpbGBm6mhoTJwqAMGaMKk
ContentType Patent
DBID EVB
DatabaseName esp@cenet
DatabaseTitleList
Database_xml – sequence: 1
  dbid: EVB
  name: esp@cenet
  url: http://worldwide.espacenet.com/singleLineSearch?locale=en_EP
  sourceTypes: Open Access Repository
DeliveryMethod fulltext_linktorsrc
Discipline Medicine
Chemistry
Sciences
Physics
ExternalDocumentID US2014193065A1
GroupedDBID EVB
ID FETCH-epo_espacenet_US2014193065A13
IEDL.DBID EVB
IngestDate Fri Jul 19 16:09:17 EDT 2024
IsOpenAccess true
IsPeerReviewed false
IsScholarly false
Language English
LinkModel DirectLink
MergedId FETCHMERGED-epo_espacenet_US2014193065A13
Notes Application Number: US201313737677
OpenAccessLink https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20140710&DB=EPODOC&CC=US&NR=2014193065A1
ParticipantIDs epo_espacenet_US2014193065A1
PublicationCentury 2000
PublicationDate 20140710
PublicationDateYYYYMMDD 2014-07-10
PublicationDate_xml – month: 07
  year: 2014
  text: 20140710
  day: 10
PublicationDecade 2010
PublicationYear 2014
RelatedCompanies CARMELA MORENO
KLA-TENCOR CORPORATION
RelatedCompanies_xml – name: KLA-TENCOR CORPORATION
– name: CARMELA MORENO
Score 2.948076
Snippet Various embodiments for detecting defects on a wafer are provided. Some embodiments include matching a template image, in which at least some pixels are...
SourceID epo
SourceType Open Access Repository
SubjectTerms CALCULATING
COMPUTING
COUNTING
IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
PHYSICS
Title Detecting Defects on a Wafer Using Template Image Matching
URI https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20140710&DB=EPODOC&locale=&CC=US&NR=2014193065A1
hasFullText 1
inHoldings 1
isFullTextHit
isPrint
link http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfV3dS8MwED_G_HzTqvgxJaD0rdi61k6hiOsHU-g2XKt7G0mXiLB1Za3473sJne5pL4UmkF4Cd7-7y--uADeuQDeaU9ugTkYN27GYQTOWGS5C30PmWOKOyuLkuH_fS-3XsTNuwGxVC6P6hP6o5oioURnqe6XsdfGfxAoUt7K8ZV84tHiKEi_Q6-jYkuGJqQddLxwOgoGv-76XjvT-m5pDXwUB9xljpS10pF1JAAvfu7IupVgHlegAtoe4Xl4dQoPnGuz5q3-vabAb11feGuwojmZW4mCth-URPKJ00lLlnyTgipBBFjmh5IMKviSKBkASPi9m-AHyMkebQWK0uTLbdAzXUZj4PQPFmfztfpKO1mVvn0AzX-T8FAjGNoxNaccULrMdfAjhUDptC4oozGjnDFqbVjrfPH0B-_JVpjEtswXNavnNLxF_K3alju0XP06JFQ
link.rule.ids 230,309,783,888,25578,76884
linkProvider European Patent Office
linkToHtml http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfV3dT8IwEL8Q_MA3nRo_UJto9ra4ySbThBjZIKAMiGzK29KO1pjARtiM_77XBpQnXvrQS9prk7vf3fXuCnBTF2hGc2ob1EmoYTsWM2jCEqOO0PeQOJa4o7I4OejfdyL7ZeyMSzBd1cKoPqE_qjkiSlSC8l4ofT3_D2L5Krcyv2VfOJU9tcOGry-9Y0u6J6buNxut4cAfeLrnNaKR3n9TNLRVEHCf0VfaQiPblZ32W-9NWZcyXweV9j5sD3G9tDiAEk81qHirv9c02A2WT94a7KgczSTHyaUc5ofwiNxJTZV-Ep-rhAySpYSSDyr4gqg0ABLy2XyKG5DuDHUGCVDnymjTEVy3W6HXMZCd-O_0cTRa5712DOU0S_kJEPRtGJtQ1xR1Zjs4COFQOqkJiijMqHsK1U0rnW0mX0GlEwa9uNftv57DniTJkKZlVqFcLL75BWJxwS7VFf4C1VCMBQ
openUrl ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Apatent&rft.title=Detecting+Defects+on+a+Wafer+Using+Template+Image+Matching&rft.inventor=RUNYON+J.+REX&rft.inventor=LAUBER+JAN+A&rft.inventor=CHU+XING&rft.date=2014-07-10&rft.externalDBID=A1&rft.externalDocID=US2014193065A1