SCANNING MIRROR DEVICE

A scanning mirror device includes a mirror, a first supporting body that supports the mirror, a plurality of securing materials that has higher rigidity than the first supporting body and supports the first supporting body, a reinforcing material that has higher rigidity than the first supporting bo...

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Bibliographic Details
Main Author KUGO KOUICHI
Format Patent
LanguageEnglish
Published 03.07.2014
Subjects
MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES
MICROSTRUCTURAL TECHNOLOGY
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PERFORMING OPERATIONS
PHYSICS
TRANSPORTING
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Summary:A scanning mirror device includes a mirror, a first supporting body that supports the mirror, a plurality of securing materials that has higher rigidity than the first supporting body and supports the first supporting body, a reinforcing material that has higher rigidity than the first supporting body and is attached to the plurality of securing materials on a surface different from a surface on which the mirror is disposed, and a first driving portion that deforms the first supporting body so as to cause the mirror to be displaced around a first axis.
Bibliography:Application Number: US201314046264