DEFECT INSPECTION DEVICE AND DEFECT INSPECTION METHOD

A defect inspection device of the present invention for detecting a position of a defect existing in a wire formed on a panel, includes: a probe which applies a voltage to a terminal section of the wire; probe moving means for moving the probe to the terminal section; a first infrared sensor which p...

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Bibliographic Details
Main Author YANASE MASAKAZU
Format Patent
LanguageEnglish
Published 03.07.2014
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Summary:A defect inspection device of the present invention for detecting a position of a defect existing in a wire formed on a panel, includes: a probe which applies a voltage to a terminal section of the wire; probe moving means for moving the probe to the terminal section; a first infrared sensor which photographs an entire surface of the panel; a second infrared sensor which photographs a part of the panel; and sensor moving means for moving the second infrared sensor to each position on the panel, the first infrared sensor including a plurality of infrared cameras.
Bibliography:Application Number: US201214126016