INTERFEROMETER HAVING MULTIPLE SCAN CARRIAGES

An interferometer includes a fixed assembly including a base, a beam splitter assembly and a fixed mirror, and a movable assembly including an upper scan carriage, a lower scan carriage and a movable mirror connected to the lower scan carriage. The pair of inner bearing flexures is connected to the...

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Bibliographic Details
Main Authors RESSLER GREGG, SALLER JEFFREY H
Format Patent
LanguageEnglish
Published 26.06.2014
Subjects
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
PHYSICS
TESTING
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Summary:An interferometer includes a fixed assembly including a base, a beam splitter assembly and a fixed mirror, and a movable assembly including an upper scan carriage, a lower scan carriage and a movable mirror connected to the lower scan carriage. The pair of inner bearing flexures is connected to the base and the upper scan carriage, enabling movement of the upper scan carriage relative to the base, and the pair of outer bearing flexures is connected to the upper and lower scan carriages, enabling movement of the lower scan carriage relative to the upper scan carriage. The movement of the upper and lower scan carriages enable a scan movement of the movable mirror in a scan direction restricted such that the scan movement maintains a plane containing the movable mirror parallel to planes containing the movable mirror at respective distances between the movable and fixed assemblies during the scan movement.
Bibliography:Application Number: US201213723274