Device for Transporting Cassette

The present invention provides a device for transporting cassette which is used to transport cassette among a crane in a stocker, a load port, and an unload port. A transport port zone is provided at the front-ends of the load port and the unload port, and a horizontal transport mechanism and a vert...

Full description

Saved in:
Bibliographic Details
Main Authors QI MINGHU, GUO ZHENHUA, YANG WEIBING, CHEN ZENGHONG, LIN KUNHSIEN, WU CHUNHAO
Format Patent
LanguageEnglish
Published 01.05.2014
Subjects
Online AccessGet full text

Cover

Loading…
More Information
Summary:The present invention provides a device for transporting cassette which is used to transport cassette among a crane in a stocker, a load port, and an unload port. A transport port zone is provided at the front-ends of the load port and the unload port, and a horizontal transport mechanism and a vertical transport mechanism are provided at the transport port zone, which transports the empty cassette from the load port to the predetermined unload port. The present invention further provides a corresponding method for transporting cassette. According to the embodiment of the present invention, it can reduce the transporting amount of the crane in the stocker, which effectively solves the bottleneck of excessive transportation of the crane in the stocker and increases the capacity.
Bibliography:Application Number: US201213701538