SPECIMEN HOLDER FOR HOLDING A SEMICONDUCTOR DEVICE DURING A SAMPLE PREPARATION PROCEDURE CARRIED OUT USING FIRST AND SECOND SAMPLE PREPARATION APPARATUSES

A specimen holder is configured to hold, during a sample preparation procedure carried out using first and second sample preparation apparatuses, a semiconductor device to be analyzed using an electron microscope. The specimen holder includes a holding portion having a support configured to support...

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Bibliographic Details
Main Author TORRISI MARCO ALFIO
Format Patent
LanguageEnglish
Published 06.03.2014
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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Summary:A specimen holder is configured to hold, during a sample preparation procedure carried out using first and second sample preparation apparatuses, a semiconductor device to be analyzed using an electron microscope. The specimen holder includes a holding portion having a support configured to support the semiconductor device; and a supporting portion configured to releasable support the holding portion. The supporting portion includes an engaging element configured to couple the specimen holder into the first and second sample preparation apparatuses during the sample preparation procedure, and a guide configured to enable the holding portion to slide within the guide and vary a position of the holding portion with respect to the supporting portion.
Bibliography:Application Number: US201213597057