PRE-IRRADIATION IN GAS DISCHARGE LASING DEVICES USING MULTIPLE PRE-IRRADIATION DISCHARGES PER ELECTRICAL FEED-THROUGH

A pre-irradiation system and method may be used in a gas discharge lasing device to provide multiple ultraviolet (UV) pre-irradiation discharges per electrical feed-through into a gas discharge chamber of the lasing device. One or more high-voltage electrical feed-throughs are electrically connected...

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Bibliographic Details
Main Authors SERCEL JEFFREY P, JENKET BRUCE R, MASSE DANIEL B, VON DADELSZEN MICHAEL, SERCEL DANA K
Format Patent
LanguageEnglish
Published 02.01.2014
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Summary:A pre-irradiation system and method may be used in a gas discharge lasing device to provide multiple ultraviolet (UV) pre-irradiation discharges per electrical feed-through into a gas discharge chamber of the lasing device. One or more high-voltage electrical feed-throughs are electrically connected to one or more high-voltage electrodes that provide multiple discharge paths to a current return electrode to allow multiple pre-irradiation discharges per feed-through in response to high-voltage pulses applied via the feed-through(s). The discharge paths may include spark gap discharge paths and/or tracking discharge paths across an insulator. In some embodiments, multiple discharge paths are formed between respective tracking locators on a high voltage electrode and/or a current return electrode. In other embodiments, multiple discharge paths are formed between respective discharge locations on a high voltage electrode surrounded by an insulator, which spark or track to a current return electrode.
Bibliography:Application Number: US201213721821