MICROELECTROMECHANICAL SENSOR MODULE AND CORRESPONDING PRODUCTION METHOD

A microelectromechanical sensor module includes a sensing mechanism for measuring an acceleration, pressure, air humidity or the like, a control mechanism for controlling the sensing mechanism, an energy supply mechanism for supplying the sensor module with energy, and a transmission mechanism for t...

Full description

Saved in:
Bibliographic Details
Main Authors PIRK TJALF, WAGNER THOMAS, FRANKE AXEL, FEYH ANDO, BISCHOPINK GEORG
Format Patent
LanguageEnglish
Published 12.12.2013
Subjects
ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVEREDIN A SINGLE OTHER SUBCLASS
MEASURING
MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE
MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
PHYSICS
TARIFF METERING APPARATUS
TESTING
Online AccessGet full text

Cover

More Information
Summary:A microelectromechanical sensor module includes a sensing mechanism for measuring an acceleration, pressure, air humidity or the like, a control mechanism for controlling the sensing mechanism, an energy supply mechanism for supplying the sensor module with energy, and a transmission mechanism for transmitting signals of the sensing mechanism. At least three of the mechanisms are integrated at the chip level in at least one chip in each case. A corresponding method is implemented to produce the microelectromechanical sensor module.
Bibliography:Application Number: US201113992136