INTEGRATION OF AUTOMATIC AND MANUAL DEFECT CLASSIFICATION

A method for defect classification includes storing definitions of defect classes in terms of a classification rules in a multi-dimensional feature space. Inspection data associated with defects detected in one or more samples under inspection is received. A plurality of first classification results...

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Bibliographic Details
Main Authors ROZENMAN EFRAT, GREENBERG GADI, KAIZERMAN IDAN
Format Patent
LanguageEnglish
Published 24.10.2013
Subjects
CALCULATING
COMPUTING
COUNTING
PHYSICS
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Summary:A method for defect classification includes storing definitions of defect classes in terms of a classification rules in a multi-dimensional feature space. Inspection data associated with defects detected in one or more samples under inspection is received. A plurality of first classification results is generated by applying an automatic classifier to the inspection data based on the definitions, the plurality of first classification results comprising a class label and a corresponding confidence level for a defect. Upon determining that a confidence level for a defect is below a predetermined confidence threshold, a plurality of second classification results are generated by applying at least one inspection modality to the defect. A report is generated comprising a distribution of the defects among the defect classes by combining the plurality of first classification results and the plurality of second classification results.
Bibliography:Application Number: US201213451496