DEVICE AND METHOD FOR POLARIMETRIC MEASUREMENT WITH MICROSCOPIC RESOLUTION, POLARIMETRY ACCESSORY FOR A MICROSCOPE, ELLIPSOMICROSCOPE AND ELLIPSOMETRIC CONTRAST MICROSCOPE

A polarimetric measurement device and method with microscopic resolution include a polarization conversion device to modify the polarization of a beam so as to switch from a spatially uniform distribution to a distribution that is cylindrically symmetric about the optical axis, and vice versa. The c...

Full description

Saved in:
Bibliographic Details
Main Author ACHER OLIVIER
Format Patent
LanguageEnglish
Published 10.10.2013
Subjects
COLORIMETRY
MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT
MEASURING
PHYSICS
RADIATION PYROMETRY
TESTING
Online AccessGet full text

Cover

More Information
Summary:A polarimetric measurement device and method with microscopic resolution include a polarization conversion device to modify the polarization of a beam so as to switch from a spatially uniform distribution to a distribution that is cylindrically symmetric about the optical axis, and vice versa. The conversion device is positioned on the axis of a focusing objective for focusing the cylindrically symmetric polarized beam onto the surface of a sample to be measured. The device may be incorporated into a microellipsometer, or an interference contrast microscope, or used as a polarimetric accessory for a microscope.
Bibliography:Application Number: US201113810791