SENSOR STRUCTURE AND YAW RATE SENSOR

A sensor structure includes a substrate having a main extension plane, a first seismic mass and a second seismic mass, the first and the second seismic masses being deflectable relative to the substrate along a direction of deflection essentially perpendicular to the main extension plane. The first...

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Bibliographic Details
Main Authors GAUGER CHRISTOPH, WELLNER PATRICK, HEITZ MARKUS, GRACKI SEBASTIAN
Format Patent
LanguageEnglish
Published 11.07.2013
Subjects
DETECTING MASSES OR OBJECTS
GEOPHYSICS
GRAVITATIONAL MEASUREMENTS
MEASURING
PHYSICS
TESTING
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Summary:A sensor structure includes a substrate having a main extension plane, a first seismic mass and a second seismic mass, the first and the second seismic masses being deflectable relative to the substrate along a direction of deflection essentially perpendicular to the main extension plane. The first and second seismic masses are coupled together via a rigid coupling rocker pivotable around a rocker axis parallel to the main extension plane. The first seismic mass is suspended from the substrate with the aid of a first suspension spring, and an essentially rigid first coupling bar is situated between the first suspension spring and the first seismic mass.
Bibliography:Application Number: US201213729709