TEMPERATURE CONTROL WITH STACKED PROPORTIONING VALVE

• Main Author: MERRY WALTER R
• Format: Patent
• Language: English
• Published: 02.05.2013
• Subjects: ACTUATING-FLOATS; APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL; APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL; BASIC ELECTRIC ELEMENTS; BLASTING; COCKS; DECORATIVE ARTS; DEVICES FOR VENTING OR AERATING; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY; ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; HEATING; LIGHTING; MECHANICAL ENGINEERING; MOSAICS; PAPERHANGING; PERFORMING OPERATIONS; PRODUCING DECORATIVE EFFECTS; SPRAYING OR ATOMISING IN GENERAL; TAPS; TARSIA WORK; TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION; TECHNICAL SUBJECTS COVERED BY FORMER USPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS; THERMAL INSULATION IN GENERAL; TRANSPORTING; VALVES; WEAPONS

A stacked proportioning valve having a body with at least two sets of ports disposed at different positions along a longitudinal length of the body, each set of ports including at least three ports at different angular positions to couple to fluid conduits, a rotor disposed in the valve body has at least two sections stacked along the longitudinal length, each section comprising three fluid channels in longitudinal alignment with one of the sets of ports, and a drive shaft affixed to the rotor, the drive shaft to rotate the rotor over angular positions to fluidly couple together pairs of ports in each of the sets of ports synchronously as a function of the rotor's angular position. In embodiments a component of a plasma processing chamber, such as a plasma etch chamber is fluidly coupled by the stack proportioning valve to reservoirs of both a hot and cold chiller.