STRUCTURES FOR REGISTRATION ERROR COMPENSATION
Metallization layer structures for reduced changes in radio frequency characteristics due to registration error and associated methods are provided herein. An example resonator includes a first conductive layer defining an error limiting feature and a second conductive layer. The resonator further i...
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Main Authors | , |
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Format | Patent |
Language | English |
Published |
25.04.2013
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Subjects | |
Online Access | Get full text |
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Summary: | Metallization layer structures for reduced changes in radio frequency characteristics due to registration error and associated methods are provided herein. An example resonator includes a first conductive layer defining an error limiting feature and a second conductive layer. The resonator further includes at least one communication feature configured to electrically couple the first conductive layer and the second conductive layer at a communication position. The error limiting feature is configured to reduce changes in radio frequency characteristics of the resonator due to registration error. Methods of manufacturing resonators are also provided herein. |
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Bibliography: | Application Number: US201213659541 |