STRUCTURES FOR REGISTRATION ERROR COMPENSATION

Metallization layer structures for reduced changes in radio frequency characteristics due to registration error and associated methods are provided herein. An example resonator includes a first conductive layer defining an error limiting feature and a second conductive layer. The resonator further i...

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Bibliographic Details
Main Authors LUO SIFEN, RICHLEY EDWARD A
Format Patent
LanguageEnglish
Published 25.04.2013
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Summary:Metallization layer structures for reduced changes in radio frequency characteristics due to registration error and associated methods are provided herein. An example resonator includes a first conductive layer defining an error limiting feature and a second conductive layer. The resonator further includes at least one communication feature configured to electrically couple the first conductive layer and the second conductive layer at a communication position. The error limiting feature is configured to reduce changes in radio frequency characteristics of the resonator due to registration error. Methods of manufacturing resonators are also provided herein.
Bibliography:Application Number: US201213659541