METHODS AND SYSTEMS FOR SEMICONDUCTOR FABRICATION WITH LOCAL PROCESSING MANAGEMENT

A method and system of semiconductor fabrication are provided. In the method, an equipment unit performs a process on substrates to form processed substrates. The equipment unit also communicates processing data to a local scheduler. The local scheduler schedules removal of processed substrates from...

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Bibliographic Details
Main Authors FOSNIGHT WILLIAM J, ROBINSON JOHN R, GAXIOLA GABRIEL, ROTHE JAN, OZA CHINMAY S
Format Patent
LanguageEnglish
Published 28.03.2013
Subjects
CALCULATING
COMPUTING
COUNTING
ELECTRIC DIGITAL DATA PROCESSING
PHYSICS
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Summary:A method and system of semiconductor fabrication are provided. In the method, an equipment unit performs a process on substrates to form processed substrates. The equipment unit also communicates processing data to a local scheduler. The local scheduler schedules removal of processed substrates from the equipment unit and delivery of unprocessed substrates to the equipment unit based on the processing data.
Bibliography:Application Number: US201113247792