THIN-FILM ACTUATOR, LIQUID EJECTION HEAD, INK CARTRIDGE, AND IMAGE FORMING APPARATUS

A thin-film actuator that deforms a diaphragm to generate force includes a lower electrode disposed on the diaphragm, a first piezoelectric layer disposed on the lower electrode, an intermediate electrode disposed on the first piezoelectric layer, a second piezoelectric layer disposed on the interme...

Full description

Saved in:
Bibliographic Details
Main Author OHTA EIICHI
Format Patent
LanguageEnglish
Published 28.02.2013
Subjects
Online AccessGet full text

Cover

Loading…
More Information
Summary:A thin-film actuator that deforms a diaphragm to generate force includes a lower electrode disposed on the diaphragm, a first piezoelectric layer disposed on the lower electrode, an intermediate electrode disposed on the first piezoelectric layer, a second piezoelectric layer disposed on the intermediate electrode, and an upper electrode disposed on the second piezoelectric layer.
Bibliography:Application Number: US201213659585