THIN-FILM ACTUATOR, LIQUID EJECTION HEAD, INK CARTRIDGE, AND IMAGE FORMING APPARATUS
A thin-film actuator that deforms a diaphragm to generate force includes a lower electrode disposed on the diaphragm, a first piezoelectric layer disposed on the lower electrode, an intermediate electrode disposed on the first piezoelectric layer, a second piezoelectric layer disposed on the interme...
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Main Author | |
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Format | Patent |
Language | English |
Published |
28.02.2013
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Subjects | |
Online Access | Get full text |
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Summary: | A thin-film actuator that deforms a diaphragm to generate force includes a lower electrode disposed on the diaphragm, a first piezoelectric layer disposed on the lower electrode, an intermediate electrode disposed on the first piezoelectric layer, a second piezoelectric layer disposed on the intermediate electrode, and an upper electrode disposed on the second piezoelectric layer. |
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Bibliography: | Application Number: US201213659585 |