COMBINED PLANAR FET AND FIN-FET DEVICES AND METHODS

• Main Authors: MAITRA KINGSUK, WAHL JEREMY A
• Format: Patent
• Language: English
• Published: 28.02.2013
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

Electronic devices (20, 20′) of superior design flexibility that avoid channel-width quantization effects common with prior art fin-type (FIN) field effect transistors (FIN-FETS) (22) are obtained by providing multiple FIN-FETs (22) and at least one planar FET (32, 32′) on a common substrate (21), w...