Determining Thin Film Stack Functional Relationships For Measurement of Chemical Composition

A method for determining chemical composition from optical properties of a stack formed with a process, by preparing test samples of the stack using known and intentional variations to the process to affect a variation in the chemical composition, measuring the optical properties of the test samples...

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Bibliographic Details
Main Author YGARTUA CARLOS L
Format Patent
LanguageEnglish
Published 07.02.2013
Subjects
CALCULATING
COMPUTING
COUNTING
ELECTRIC DIGITAL DATA PROCESSING
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
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Summary:A method for determining chemical composition from optical properties of a stack formed with a process, by preparing test samples of the stack using known and intentional variations to the process to affect a variation in the chemical composition, measuring the optical properties of the test samples, measuring the chemical composition of the test samples, performing a processor-based regression analysis to determine an optical state function including correlations between the optical properties of the test samples and the chemical composition of the test samples, fabricating production samples of the stack using the process, measuring the optical properties of the production samples, and estimating the chemical composition of the production samples using the optical state function.
Bibliography:Application Number: US201113195063